From mahnaz at snf.stanford.edu  Thu Jan  8 11:25:44 2004
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 8 Jan 2004 11:25:44 -0800
Subject: Problem svgdev2 2004-01-08 11:25:43: Report Problem for svgdev2
Message-ID: <mailman.207.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

I see water residue on the back of wagers.



From vilanova at snf.stanford.edu  Thu Jan  8 14:05:00 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 8 Jan 2004 14:05:00 -0800
Subject: Problem svgdev2 2004-01-08 11:25:43: Report Problem for svgdev2
Message-ID: <mailman.208.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

back splash nozzle reseted , cycled wafers , ready to use.



From daneman at snf.stanford.edu  Sat Jan 10 21:23:20 2004
From: daneman at snf.stanford.edu (daneman at snf.stanford.edu)
Date: Sat, 10 Jan 2004 21:23:20 -0800
Subject: Problem svgdev2 2004-01-10 21:23:19: Bad centering on spinner
Message-ID: <mailman.209.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

The wafers do not center on the spinner, which can result in
wafer breakage.



From vilanova at snf.stanford.edu  Mon Jan 12 07:48:59 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 12 Jan 2004 07:48:59 -0800
Subject: Problem svgdev2 2004-01-10 21:23:19: Bad centering on spinner
Message-ID: <mailman.210.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

checked and adjusted  wafer centering. ok to use.



From pnataraj at snf.stanford.edu  Tue Jan 13 08:58:22 2004
From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu)
Date: Tue, 13 Jan 2004 08:58:22 -0800
Subject: Problem svgdev2 2004-01-13 08:58:22: wafer broke in the developer bath
Message-ID: <mailman.211.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

Wafer broke in the developer bath because of the 
 offcententer problem on  the vacuum chuck 



From vilanova at snf.stanford.edu  Tue Jan 13 10:58:18 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 13 Jan 2004 10:58:18 -0800
Subject: Problem svgdev2 2004-01-13 08:58:22: wafer broke in the developer bath
Message-ID: <mailman.212.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

cleaned catch cup , adjusted wafer centering , preventive
maintenance  completed, cycled wafers , ok to use. :-) 



From chcheng at snf.stanford.edu  Sat Jan 31 11:15:12 2004
From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu)
Date: Sat, 31 Jan 2004 11:15:12 -0800
Subject: Problem svgdev2 2004-01-31 11:15:10: Broken Wafer
Message-ID: <mailman.213.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

Sorry that I have one wafer broken into pieces during developing.  It needs to be cleaned.  Thanks.