From jzheng at snf.stanford.edu  Mon Sep 27 15:54:37 2004
From: jzheng at snf.stanford.edu (jzheng at snf.stanford.edu)
Date: Mon, 27 Sep 2004 15:54:37 -0700
Subject: Problem svgdev2 SNF 2004-09-27 15:54:37: break wafer pieces found in the develop chamber, need clean!
Message-ID: <mailman.251.1357938778.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Sep 28 08:05:58 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 28 Sep 2004 08:05:58 -0700
Subject: Problem svgdev2 SNF 2004-09-27 15:54:37: break wafer pieces found in the develop chamber, need clean!
Message-ID: <mailman.252.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

Removed wafers pieces , cleaned catch cup cycled wafers
ok to use. 



From caudillo at snf.stanford.edu  Tue Sep 28 12:49:00 2004
From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu)
Date: Tue, 28 Sep 2004 12:49:00 -0700
Subject: Shutdown svgdev2 SNF 2004-09-28 12:48:59: hotplate has resist
Message-ID: <mailman.253.1357938778.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Sep 28 13:57:42 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 28 Sep 2004 13:57:42 -0700
Subject: Shutdown svgdev2 SNF 2004-09-28 12:48:59: hotplate has resist
Message-ID: <mailman.254.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

cleand and tested hotplate ok to use.