From jhpark9 at snf.stanford.edu Wed Apr 20 16:03:58 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Wed, 20 Apr 2005 16:03:58 -0700 Subject: Problem svgdev2 SNF 2005-04-20 16:03:57: not working for the auto transfer function Message-ID: not working for the automatic wafer transfering function. Check is needed From vilanova at snf.stanford.edu Thu Apr 21 07:19:43 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Apr 2005 07:19:43 -0700 Subject: Problem svgdev2 SNF 2005-04-20 16:03:57: not working for the auto transfer function Message-ID: Operator Error , checked canister ( canister was full of developer) checked programs, cycled wafers , ok to use. From lindaw at snf.stanford.edu Sun Apr 24 11:36:00 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 24 Apr 2005 11:36:00 -0700 Subject: Comment svgdev2 SNF 2005-04-24 11:35:59: There is a large gouge on the edge of the hot plate Message-ID: There is a giant inch long scratch or gouge on the edge of the hot plate that wasn't there yesterday. 4 inch wafers should not be affected. From vilanova at snf.stanford.edu Mon Apr 25 07:40:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Apr 2005 07:40:20 -0700 Subject: Comment svgdev2 SNF 2005-04-24 11:35:59: There is a large gouge on the edge of the hot plate Message-ID: that scratch has always been there, it does not affect the wafers.