From amyers at snf.stanford.edu Thu Feb 17 13:52:40 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Thu, 17 Feb 2005 13:52:40 -0800 Subject: Problem svgdev2 SNF 2005-02-17 13:52:39: chuck did not spin at 0.08 rpm and Message-ID: is squeaking at 0.8 rpm From vilanova at snf.stanford.edu Fri Feb 18 10:08:33 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 Feb 2005 10:08:33 -0800 Subject: Problem svgdev2 SNF 2005-02-17 13:52:39: chuck did not spin at 0.08 rpm and Message-ID: Wekkly Maintenance Completed, replaced bad spindle, calibrated new spindle, cycled wafers , ok to use. From sjo at snf.stanford.edu Fri Feb 25 12:52:42 2005 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Fri, 25 Feb 2005 12:52:42 -0800 Subject: Problem svgdev2 SNF 2005-02-25 12:52:41: Wafer not centered on chuck Message-ID: The wafer wobbles on its chuck on both SVGDev1 and SVGDev2. The stops on the tracks might need readjustment. On SVGDev2 a wafer for some reason was so off-center (1 inch) that it would have flung off if I hadn't stopped spinner. SVGDev1 has ca. 1/3 inch imbalance. From vilanova at snf.stanford.edu Fri Feb 25 13:43:53 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 25 Feb 2005 13:43:53 -0800 Subject: Problem svgdev2 SNF 2005-02-25 12:52:41: Wafer not centered on chuck Message-ID: adjusted wafer center, cycled wafers ok to use.