Problem svgdev2 SNF 2005-02-25 12:52:41: Wafer not centered on chuck

sjo at snf.stanford.edu sjo at snf.stanford.edu
Fri Feb 25 12:52:42 PST 2005


The wafer wobbles on its chuck on both SVGDev1 and SVGDev2. The stops on the tracks might need readjustment. On SVGDev2 a wafer for some reason was so off-center (1 inch) that it would have flung off if I hadn't stopped spinner. SVGDev1 has ca. 1/3 inch imbalance.




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