From amyers at snf.stanford.edu  Wed Jan  5 16:38:10 2005
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Wed, 5 Jan 2005 16:38:10 -0800
Subject: Problem svgdev2 SNF 2005-01-05 16:38:09: developer is not coating the whole wafer surface
Message-ID: <mailman.271.1357938778.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Jan  6 08:08:38 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 6 Jan 2005 08:08:38 -0800
Subject: Problem svgdev2 SNF 2005-01-05 16:38:09: developer is not coating the whole wafer surface
Message-ID: <mailman.272.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

cycled several wafers , system running fine, no problem
found , ok to use. 



From lsf at snf.stanford.edu  Sun Jan 23 17:13:23 2005
From: lsf at snf.stanford.edu (lsf at snf.stanford.edu)
Date: Sun, 23 Jan 2005 17:13:23 -0800
Subject: Problem svgdev2 SNF 2005-01-23 17:13:23: low developer 
Message-ID: <mailman.273.1357938778.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Jan 24 08:12:12 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 24 Jan 2005 08:12:12 -0800
Subject: Problem svgdev2 SNF 2005-01-23 17:13:23: low developer 
Message-ID: <mailman.274.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

refilled developer canister , ok to use.