From fengj at snf.stanford.edu  Fri Mar 11 20:17:16 2005
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Fri, 11 Mar 2005 20:17:16 -0800
Subject: Problem svgdev2 SNF 2005-03-11 20:17:16: a wafer fell off and broke
Message-ID: <mailman.279.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

cannot get the pieces it out



From vilanova at snf.stanford.edu  Mon Mar 14 07:16:47 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 14 Mar 2005 07:16:47 -0800
Subject: Problem svgdev2 SNF 2005-03-11 20:17:16: a wafer fell off and broke
Message-ID: <mailman.280.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

removed wafer pieces , ok to use. 



From yeh at snf.stanford.edu  Thu Mar 24 00:01:35 2005
From: yeh at snf.stanford.edu (yeh at snf.stanford.edu)
Date: Thu, 24 Mar 2005 00:01:35 -0800
Subject: Comment svgdev2 SNF 2005-03-24 00:01:34: wafer not centered on dev chuck
Message-ID: <mailman.281.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

sometimes, wafer will be moved off-center right before the chuck goes down for dev.  looks like it's due to wafer stop moving out.



From vilanova at snf.stanford.edu  Thu Mar 24 08:25:25 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 24 Mar 2005 08:25:25 -0800
Subject: Comment svgdev2 SNF 2005-03-24 00:01:34: wafer not centered on dev chuck
Message-ID: <mailman.282.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

adjusted wafer chuck , cycled wafers ok to use. 



From lindaw at snf.stanford.edu  Thu Mar 24 09:35:13 2005
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 24 Mar 2005 09:35:13 -0800
Subject: Problem svgdev2 SNF 2005-03-24 09:35:11: won't take wafer from load cassette
Message-ID: <mailman.283.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

Yes it is enabled.



From lindaw at snf.stanford.edu  Thu Mar 24 09:37:06 2005
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 24 Mar 2005 09:37:06 -0800
Subject: Comment svgdev2 SNF 2005-03-24 09:37:03: wouldn't take wafer because developer level low.
Message-ID: <mailman.284.1357938778.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Mar 24 13:17:50 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 24 Mar 2005 13:17:50 -0800
Subject: Problem svgdev2 SNF 2005-03-24 09:35:11: won't take wafer from load cassette
Message-ID: <mailman.285.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

I just added developer to the canister, cycled wafers , ok to use.



From vilanova at snf.stanford.edu  Thu Mar 24 13:18:23 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 24 Mar 2005 13:18:23 -0800
Subject: Comment svgdev2 SNF 2005-03-24 09:37:03: wouldn't take wafer because developer level low.
Message-ID: <mailman.286.1357938778.25913.svgdev2-pcs@snf.stanford.edu>

added developer to canister , cycled wafers , ok to use.