Problem svgdev2 SNF 2005-03-24 09:35:11: won't take wafer from load cassette
lindaw at snf.stanford.edu
lindaw at snf.stanford.edu
Thu Mar 24 09:35:13 PST 2005
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Comment svgdev2 SNF 2005-03-24 00:01:34: wafer not centered on dev chuck
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Problem svgdev2 SNF 2005-03-24 09:35:11: won't take wafer from load cassette
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Yes it is enabled.
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Comment svgdev2 SNF 2005-03-24 00:01:34: wafer not centered on dev chuck
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Problem svgdev2 SNF 2005-03-24 09:35:11: won't take wafer from load cassette
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