From vilanova at snf.stanford.edu Thu Nov 17 09:30:49 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Nov 2005 09:30:49 -0800 Subject: Shutdown svgdev2 SNF 2005-11-17 09:30:48: Weekly Pm In progress................ Message-ID: From vilanova at snf.stanford.edu Thu Nov 17 10:34:05 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 Nov 2005 10:34:05 -0800 Subject: Shutdown svgdev2 SNF 2005-11-17 09:30:48: Weekly Pm In progress................ Message-ID: Weekly Pm Completed , cycled wafers , ok to use. From huangzb at snf.stanford.edu Sun Nov 20 16:15:55 2005 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 20 Nov 2005 16:15:55 -0800 Subject: Shutdown svgdev2 SNF 2005-11-20 16:15:54: wafer breaks Message-ID: wafer breaks in the developer From martinez at snf.stanford.edu Mon Nov 21 09:43:18 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 21 Nov 2005 09:43:18 -0800 Subject: Shutdown svgdev2 SNF 2005-11-20 16:15:54: wafer breaks Message-ID: cleaned broken wafer completed WPM, cycled test wafers ready for use From lindaw at snf.stanford.edu Mon Nov 21 12:24:20 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 21 Nov 2005 12:24:20 -0800 Subject: Problem svgdev2 SNF 2005-11-21 12:24:19: dried developer on post bake chuck Message-ID: From martinez at snf.stanford.edu Mon Nov 21 16:32:54 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 21 Nov 2005 16:32:54 -0800 Subject: Problem svgdev2 SNF 2005-11-21 12:24:19: dried developer on post bake chuck Message-ID: cleaned broken wafer cycled mary c.'s wafers From jasmine at snf.stanford.edu Wed Nov 23 15:34:55 2005 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Wed, 23 Nov 2005 15:34:55 -0800 Subject: Problem svgdev2 SNF 2005-11-23 15:34:54: chuck problem Message-ID: The chuck on the developer doesn't spin From jhpark9 at snf.stanford.edu Wed Nov 23 17:24:35 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Wed, 23 Nov 2005 17:24:35 -0800 Subject: Problem svgdev2 SNF 2005-11-23 17:24:35: vacuum problem Message-ID: When a wafer goes into develop section, there is a vacuum problem. Because of this reason, one wafer was broken in that section. However, now is ok.(I don't know when the problem is shown) Check please. From vilanova at snf.stanford.edu Mon Nov 28 07:36:44 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Nov 2005 07:36:44 -0800 Subject: Problem svgdev2 SNF 2005-11-23 15:34:54: chuck problem Message-ID: Refilled canister cycled wafers , ok to use, you have to remember that when the developer canister ( container with Developer LDDW26 ) is low or empty the machine doesnt work . From vilanova at snf.stanford.edu Mon Nov 28 07:37:03 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 28 Nov 2005 07:37:03 -0800 Subject: Problem svgdev2 SNF 2005-11-23 17:24:35: vacuum problem Message-ID: read previous Message. ok to use. From rcordova at snf.stanford.edu Tue Nov 29 15:02:16 2005 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 29 Nov 2005 15:02:16 -0800 Subject: Problem svgdev2 SNF 2005-11-29 15:02:13: Still mis-loading wafers Message-ID: Last two wafers were not centered. Very loud high spin speed noise. Luckily wafer did not break. From rcordova at snf.stanford.edu Tue Nov 29 15:05:18 2005 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 29 Nov 2005 15:05:18 -0800 Subject: Shutdown svgdev2 SNF 2005-11-29 15:05:16: Shutdown as per Mahnaz Message-ID: Very bad centering of wafers. System is down From martinez at snf.stanford.edu Tue Nov 29 16:18:04 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 29 Nov 2005 16:18:04 -0800 Subject: Shutdown svgdev2 SNF 2005-11-29 15:05:16: Shutdown as per Mahnaz Message-ID: lapped spin chuck calibrated spindle cycled 5 wafers From martinez at snf.stanford.edu Tue Nov 29 16:18:18 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 29 Nov 2005 16:18:18 -0800 Subject: Problem svgdev2 SNF 2005-11-29 15:02:13: Still mis-loading wafers Message-ID: problem cleared From martinez at snf.stanford.edu Wed Nov 30 09:10:20 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 30 Nov 2005 09:10:20 -0800 Subject: Shutdown svgdev2 SNF 2005-11-30 09:10:20: replace spindle Message-ID: From martinez at snf.stanford.edu Wed Nov 30 10:38:25 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 30 Nov 2005 10:38:25 -0800 Subject: Shutdown svgdev2 SNF 2005-11-30 09:10:20: replace spindle Message-ID: replaced spindle and calibrated spindle spin speed cycled 10 test wafers. ready for use