Problem svgdev2 SNF 2005-11-23 17:24:35: vacuum problem

jhpark9 at snf.stanford.edu jhpark9 at snf.stanford.edu
Wed Nov 23 17:24:35 PST 2005


When a wafer goes into develop section, there is a vacuum problem. Because of this reason, one wafer was broken in that section. However, now is ok.(I don't know when the problem is shown) Check please.




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