Shutdown svgdev2 SNF 2005-11-29 15:05:16: Shutdown as per Mahnaz

martinez at snf.stanford.edu martinez at snf.stanford.edu
Tue Nov 29 16:18:04 PST 2005


lapped spin chuck
calibrated spindle
cycled 5 wafers




More information about the svgdev2-pcs mailing list