From lindaw at snf.stanford.edu  Sat Oct  1 12:30:11 2005
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Sat, 1 Oct 2005 12:30:11 -0700
Subject: Comment svgdev2 SNF 2005-10-01 12:30:11: found resist all over the hot plate chuck.
Message-ID: <mailman.339.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

I tried to clean it up.  Most came off, but there is still a visible discoloration on the chuck.  I suspect that the resist has been baking for a really long time. 



From vilanova at snf.stanford.edu  Mon Oct  3 07:11:41 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 3 Oct 2005 07:11:41 -0700
Subject: Comment svgdev2 SNF 2005-10-01 12:30:11: found resist all over the hot plate chuck.
Message-ID: <mailman.340.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

cleaned hotplate, ok to use. 



From king at snf.stanford.edu  Fri Oct  7 16:15:33 2005
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Fri, 7 Oct 2005 16:15:33 -0700
Subject: Problem svgdev2 SNF 2005-10-07 16:15:32: svgdev2 bake track
Message-ID: <mailman.341.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

 the rubber bands drag the wafer toward the side and under the metal bars.  Will break wafers.



From martinez at snf.stanford.edu  Fri Oct  7 16:36:00 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 7 Oct 2005 16:36:00 -0700
Subject: Problem svgdev2 SNF 2005-10-07 16:15:32: svgdev2 bake track
Message-ID: <mailman.342.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

adj rail height, cycled test wafers
ok now



From calarrudo at snf.stanford.edu  Wed Oct 12 13:41:54 2005
From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu)
Date: Wed, 12 Oct 2005 13:41:54 -0700
Subject: Problem svgdev2 SNF 2005-10-12 13:41:53: Wafer shifting position 
Message-ID: <mailman.343.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

Wafer shifted, not centered on develop chuck



From vilanova at snf.stanford.edu  Wed Oct 12 14:13:57 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 12 Oct 2005 14:13:57 -0700
Subject: Problem svgdev2 SNF 2005-10-12 13:41:53: Wafer shifting position 
Message-ID: <mailman.344.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

refilled developer canister , cycled wafers , ok to use. 
 



From martinez at snf.stanford.edu  Tue Oct 18 09:11:39 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Tue, 18 Oct 2005 09:11:39 -0700
Subject: Shutdown svgdev2 SNF 2005-10-18 09:11:38: WPM
Message-ID: <mailman.345.1357938779.25913.svgdev2-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Tue Oct 18 09:51:46 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Tue, 18 Oct 2005 09:51:46 -0700
Subject: Shutdown svgdev2 SNF 2005-10-18 09:11:38: WPM
Message-ID: <mailman.346.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

wpm done



From mahnaz at snf.stanford.edu  Wed Oct 19 10:11:33 2005
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 19 Oct 2005 10:11:33 -0700
Subject: Problem svgdev2 SNF 2005-10-19 10:11:33: I see developer mark on the back of wafers
Message-ID: <mailman.347.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

A lot.



From martinez at snf.stanford.edu  Wed Oct 19 10:39:05 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Wed, 19 Oct 2005 10:39:05 -0700
Subject: Problem svgdev2 SNF 2005-10-19 10:11:33: I see developer mark on the back of wafers
Message-ID: <mailman.348.1357938779.25913.svgdev2-pcs@snf.stanford.edu>

adj back rinse nozzle cycled wafers
ok now