From swkim at snf.stanford.edu Tue Sep 6 18:18:02 2005 From: swkim at snf.stanford.edu (swkim at snf.stanford.edu) Date: Tue, 6 Sep 2005 18:18:02 -0700 Subject: Problem svgdev2 SNF 2005-09-06 18:18:01: wafer broken Message-ID: my wafer's got broken into pieces in the developer. Be careful while you're using. sorry about that. From martinez at snf.stanford.edu Wed Sep 7 09:23:25 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 7 Sep 2005 09:23:25 -0700 Subject: Problem svgdev2 SNF 2005-09-06 18:18:01: wafer broken Message-ID: cleaned broken wafer, cycled test wafers weekly pm completed From duygu at snf.stanford.edu Wed Sep 7 12:25:22 2005 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Wed, 7 Sep 2005 12:25:22 -0700 Subject: Shutdown svgdev2 SNF 2005-09-07 12:25:21: svgdev2 problem Message-ID: Wafer is broken inside the svg developer part From duygu at snf.stanford.edu Wed Sep 7 12:28:18 2005 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Wed, 7 Sep 2005 12:28:18 -0700 Subject: Problem svgdev2 SNF 2005-09-07 12:28:13: svgdev2 Message-ID: Wafer is broken inside it From martinez at snf.stanford.edu Wed Sep 7 14:01:51 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 7 Sep 2005 14:01:51 -0700 Subject: Problem svgdev2 SNF 2005-09-07 12:28:13: svgdev2 Message-ID: problem clearred From martinez at snf.stanford.edu Wed Sep 7 14:02:24 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 7 Sep 2005 14:02:24 -0700 Subject: Shutdown svgdev2 SNF 2005-09-07 12:25:21: svgdev2 problem Message-ID: cleaned broken wafer cycled 10 dummy wafers, prog#3 ready for use From nvgirish at snf.stanford.edu Wed Sep 14 00:10:21 2005 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Wed, 14 Sep 2005 00:10:21 -0700 Subject: Problem svgdev2 SNF 2005-09-14 00:10:20: Transfer belt not working Message-ID: Hi The transfer belt in the SVGDEV2 (from the loader to the developer) is not able to transfer the wafer. Also index reset cannot bring the receiver cassette back up. Can you look into this? Thanks Girish From vilanova at snf.stanford.edu Wed Sep 14 07:14:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Sep 2005 07:14:20 -0700 Subject: Problem svgdev2 SNF 2005-09-14 00:10:20: Transfer belt not working Message-ID: The reason why the system wasnt working was because the system shutdown automatically when the canister ( developer tank ) is empty , I refilled the canister with developer ( LDD-26W) Cycled several wafers, ready to use. :-) From gibby at snf.stanford.edu Thu Sep 15 09:49:23 2005 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Thu, 15 Sep 2005 09:49:23 -0700 Subject: Comment svgdev2 SNF 2005-09-15 09:49:23: Timing of Developer Stop Message-ID: The wafer stop on the developer station is rising early, causing the wafers to hop on the track From vilanova at snf.stanford.edu Thu Sep 15 13:46:47 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Sep 2005 13:46:47 -0700 Subject: Comment svgdev2 SNF 2005-09-15 09:49:23: Timing of Developer Stop Message-ID: cycled several wafers and the system is working fine. Could not repeat the problem , ok to use. From martinez at snf.stanford.edu Thu Sep 29 13:26:43 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 29 Sep 2005 13:26:43 -0700 Subject: Shutdown svgdev2 SNF 2005-09-29 13:26:41: WPM Message-ID: From martinez at snf.stanford.edu Thu Sep 29 13:58:08 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 29 Sep 2005 13:58:08 -0700 Subject: Shutdown svgdev2 SNF 2005-09-29 13:26:41: WPM Message-ID: wpm done