Problem svgdev2 SNF 2006-08-12 15:41:58: prog 6

yeh at snf.stanford.edu yeh at snf.stanford.edu
Sat Aug 12 15:41:58 PDT 2006


1st puddle of developer does not cover entire wafer.  had to increase injection time from 10sec to 20sec to cover entire wafer with developer puddle




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