From kimsangb at snf.stanford.edu Mon Dec 4 21:11:26 2006 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Mon, 4 Dec 2006 21:11:26 -0800 Subject: Problem svgdev2 SNF 2006-12-04 21:11:26: Developer splashes to hot plate. Message-ID: The wafer on the hot plate got developed by the drops of developers from the developer site. From erichall at snf.stanford.edu Mon Dec 4 21:53:34 2006 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Mon, 4 Dec 2006 21:53:34 -0800 Subject: Comment svgdev2 SNF 2006-12-04 21:53:34: No splashing Message-ID: prior reported splashing not observed when I used this track. From vilanova at snf.stanford.edu Tue Dec 5 07:40:17 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 5 Dec 2006 07:40:17 -0800 Subject: Problem svgdev2 SNF 2006-12-04 21:11:26: Developer splashes to hot plate. Message-ID: Cycled 10 wafers No back splash , Ok to use. From vilanova at snf.stanford.edu Tue Dec 5 07:40:30 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 5 Dec 2006 07:40:30 -0800 Subject: Comment svgdev2 SNF 2006-12-04 21:53:34: No splashing Message-ID: NO Splashing. From king at snf.stanford.edu Tue Dec 5 16:03:07 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 5 Dec 2006 16:03:07 -0800 Subject: Comment svgdev2 SNF 2006-12-05 16:03:06: SVGdev2 throws developer Message-ID: to the right outside the well and onto the surrounding surfaces, at the end of the develop dispense cycle. Might be intermittent and it's not a currently problem unless it starts flinging it further to the bake plate or other track. I showed Uija. FYI... From vilanova at snf.stanford.edu Wed Dec 6 14:10:04 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Dec 2006 14:10:04 -0800 Subject: Shutdown svgdev2 SNF 2006-12-06 14:10:04: pm in progress............ Message-ID: From vilanova at snf.stanford.edu Wed Dec 6 14:47:19 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Dec 2006 14:47:19 -0800 Subject: Comment svgdev2 SNF 2006-12-05 16:03:06: SVGdev2 throws developer Message-ID: Monthly Pm Completed cleaned catch cup hotplate , cleaned and lubricated Indexers , Adjusted Back Splash Nozzle, Cycled wafers , ok to use. From vilanova at snf.stanford.edu Wed Dec 6 14:47:38 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Dec 2006 14:47:38 -0800 Subject: Shutdown svgdev2 SNF 2006-12-06 14:10:04: pm in progress............ Message-ID: preventive Maintenance Completed, cycled wafers , ok to use. From dgunning at snf.stanford.edu Thu Dec 14 04:28:42 2006 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 14 Dec 2006 04:28:42 -0800 Subject: Problem svgdev2 SNF 2006-12-14 04:28:41: oven station and receiving platform Message-ID: Stumbled upon a little problem with track2. White arms on oven station wouldn't open for 2nd wafer to bake and receiving platform was permanently moving. 2nd wafer got trapped in developemnt step. From dgunning at snf.stanford.edu Thu Dec 14 04:31:14 2006 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 14 Dec 2006 04:31:14 -0800 Subject: Problem svgdev2 SNF 2006-12-14 04:31:13: also... Message-ID: I forgot to say, I pressed 'transfer stop' to stop carrier wires from constantly moving. Receiving platform is stuck in lowered position. From vilanova at snf.stanford.edu Thu Dec 14 07:56:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Dec 2006 07:56:43 -0800 Subject: Problem svgdev2 SNF 2006-12-14 04:28:41: oven station and receiving platform Message-ID: User removed the wafers before the cycle finish this get the system in under a unstable & confuse condition, the wafer chuck was waiting for a wafer also the receiving cassette was waiting for a wafer, I Initialized system Cycled wafers a couple of times , system bacvk to normal. From vilanova at snf.stanford.edu Thu Dec 14 07:56:54 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Dec 2006 07:56:54 -0800 Subject: Problem svgdev2 SNF 2006-12-14 04:31:13: also... Message-ID: Read previous message.