Problem svgdev2 SNF 2006-12-14 04:28:41: oven station and receiving platform

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Dec 14 07:56:43 PST 2006


User removed the wafers before the cycle finish this get
the system in under a unstable & confuse condition,
the wafer chuck was waiting for a wafer also the receiving
cassette was waiting for a wafer,  I Initialized system 
Cycled wafers a couple of times , system bacvk to normal.




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