From rcordova at snf.stanford.edu Wed Feb 1 09:08:35 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Wed, 1 Feb 2006 09:08:35 -0800 Subject: Problem svgdev2 SNF 2006-02-01 09:08:34: Wafer broken inside Message-ID: Needs cleaning. broken wafer From vilanova at snf.stanford.edu Wed Feb 1 09:26:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Feb 2006 09:26:58 -0800 Subject: Problem svgdev2 SNF 2006-02-01 09:08:34: Wafer broken inside Message-ID: removed broken wafer cleaned catch cup, cycled wafers, ready to use. From vilanova at snf.stanford.edu Mon Feb 6 14:13:42 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Feb 2006 14:13:42 -0800 Subject: Shutdown svgdev2 SNF 2006-02-06 14:13:41: Weekly Maintenance routine ......... Message-ID: From vilanova at snf.stanford.edu Mon Feb 6 14:43:04 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Feb 2006 14:43:04 -0800 Subject: Shutdown svgdev2 SNF 2006-02-06 14:13:41: Weekly Maintenance routine ......... Message-ID: Weekly PM Completed. From lindaw at snf.stanford.edu Sat Feb 11 11:36:48 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 11 Feb 2006 11:36:48 -0800 Subject: Comment svgdev2 SNF 2006-02-11 11:36:47: found the hot plate chuck contaminated with ? Message-ID: It appears that the lab member who gunked up the SVGCOAT1 also ran his/her porous wafer through SVGDEV2. It looks like a combination of resist and developer dried onto the chuck. I will attempt to clean it. Not happy. From lindaw at snf.stanford.edu Sat Feb 11 11:57:34 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 11 Feb 2006 11:57:34 -0800 Subject: Comment svgdev2 SNF 2006-02-11 11:57:34: bake chuck contamination won't come clean Message-ID: I tried using a wipe moistened with DIH2O, but the contamination will not remove easily. From lindaw at snf.stanford.edu Sat Feb 11 12:49:36 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 11 Feb 2006 12:49:36 -0800 Subject: Problem svgdev2 SNF 2006-02-11 12:49:35: contamination on bake chuck Message-ID: From vilanova at snf.stanford.edu Mon Feb 13 08:18:53 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Feb 2006 08:18:53 -0800 Subject: Problem svgdev2 SNF 2006-02-11 12:49:35: contamination on bake chuck Message-ID: cleaned hotplate, ok to use. From vilanova at snf.stanford.edu Mon Feb 13 08:19:08 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Feb 2006 08:19:08 -0800 Subject: Comment svgdev2 SNF 2006-02-11 11:36:47: found the hot plate chuck contaminated with ? Message-ID: cleaned hotplate, ready to use. From vilanova at snf.stanford.edu Mon Feb 13 08:19:23 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Feb 2006 08:19:23 -0800 Subject: Comment svgdev2 SNF 2006-02-11 11:57:34: bake chuck contamination won't come clean Message-ID: cleaned hotplate , ok to use. From rcordova at snf.stanford.edu Mon Feb 13 13:43:12 2006 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Mon, 13 Feb 2006 13:43:12 -0800 Subject: Comment svgdev2 SNF 2006-02-13 13:43:12: Receive cassette not accepting wafers. Message-ID: from hotplate to output cassette, wafers will not load into cassette. From vilanova at snf.stanford.edu Mon Feb 13 14:07:36 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Feb 2006 14:07:36 -0800 Subject: Comment svgdev2 SNF 2006-02-13 13:43:12: Receive cassette not accepting wafers. Message-ID: This Usually happens when the canister i sgetting low , Added Developer to canister , cycled wafers , ok to use.