From jscyb at snf.stanford.edu Sat Jun 3 16:57:13 2006 From: jscyb at snf.stanford.edu (jscyb at snf.stanford.edu) Date: Sat, 3 Jun 2006 16:57:13 -0700 Subject: Problem svgdev2 SNF 2006-06-03 16:57:13: scratches back of wafers Message-ID: We are using double polished wafers and noticed that all of the wafers processed here are getting long straight scratches on the backside. From vilanova at snf.stanford.edu Mon Jun 5 07:25:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Jun 2006 07:25:58 -0700 Subject: Problem svgdev2 SNF 2006-06-03 16:57:13: scratches back of wafers Message-ID: cleaned indexer and transfer Belts, cycled wafers, Front and back of wafer looks Cleaned, Good to use. From jtsai at snf.stanford.edu Mon Jun 5 18:02:28 2006 From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu) Date: Mon, 5 Jun 2006 18:02:28 -0700 Subject: Problem svgdev2 SNF 2006-06-05 18:02:27: sender couldn't raise Message-ID: sender couldn't raise, used in the manual mode. From vilanova at snf.stanford.edu Tue Jun 6 07:32:42 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Jun 2006 07:32:42 -0700 Subject: Problem svgdev2 SNF 2006-06-05 18:02:27: sender couldn't raise Message-ID: FOUND CANISTER OUT OF DEVELOPER, REFILLED CANISTER, CYCLED WAFERS , GOOD TO USE. PLEASE CHECK DEVELOPER CANISTER LEVEL BEFORE YOU RUN YOUR PROCESS, JUST THE WAY THEY SHOW YOU IN THE TRAINING CLASS. From vilanova at snf.stanford.edu Wed Jun 7 09:49:48 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Jun 2006 09:49:48 -0700 Subject: Shutdown svgdev2 SNF 2006-06-07 09:49:44: Pm In progress....... Message-ID: From vilanova at snf.stanford.edu Wed Jun 7 09:49:50 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Jun 2006 09:49:50 -0700 Subject: Shutdown svgdev2 SNF 2006-06-07 09:49:44: Pm In progress....... Message-ID: From vilanova at snf.stanford.edu Wed Jun 7 14:14:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Jun 2006 14:14:43 -0700 Subject: Shutdown svgdev2 SNF 2006-06-07 09:49:44: Pm In progress....... Message-ID: MOnthly Pm Completed, ready to use. From ndhuang at snf.stanford.edu Mon Jun 12 18:24:59 2006 From: ndhuang at snf.stanford.edu (ndhuang at snf.stanford.edu) Date: Mon, 12 Jun 2006 18:24:59 -0700 Subject: Problem svgdev2 SNF 2006-06-12 18:24:59: Photoresist on the backside Message-ID: I am very sorry that I forgot to stop the oven when I developed wafers with photoresist on both sides on SVG devewlop track 2. From vilanova at snf.stanford.edu Tue Jun 13 06:56:38 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Jun 2006 06:56:38 -0700 Subject: Problem svgdev2 SNF 2006-06-12 18:24:59: Photoresist on the backside Message-ID: cleaned resist from hotplate, ok to use. From changyol at snf.stanford.edu Thu Jun 22 10:16:06 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 22 Jun 2006 10:16:06 -0700 Subject: Shutdown svgdev2 SNF 2006-06-22 10:16:04: sender elevator unit problem Message-ID: waiting for rep to come and bring pcb. From vilanova at snf.stanford.edu Thu Jun 22 14:20:34 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 Jun 2006 14:20:34 -0700 Subject: Shutdown svgdev2 SNF 2006-06-22 14:20:33: Bad I/O Board . Message-ID: Vendor Will bring I/O board tomorrow 6/23/06 morning around 7:30AM . From vilanova at snf.stanford.edu Fri Jun 23 13:39:04 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Jun 2006 13:39:04 -0700 Subject: Shutdown svgdev2 SNF 2006-06-22 10:16:04: sender elevator unit problem Message-ID: Replaced bad CPU board, I/O board and motherboard of card cage, adjusted Indexer Sender , Cycled wafers , ready to use. From vilanova at snf.stanford.edu Fri Jun 23 13:39:22 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Jun 2006 13:39:22 -0700 Subject: Shutdown svgdev2 SNF 2006-06-22 14:20:33: Bad I/O Board . Message-ID: