Problem svgdev2 SNF 2006-06-03 16:57:13: scratches back of wafers

jscyb at snf.stanford.edu jscyb at snf.stanford.edu
Sat Jun 3 16:57:13 PDT 2006


We are using double polished wafers and noticed that all of the wafers processed here are getting long straight scratches on the backside.




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