Problem svgdev2 SNF 2006-05-26 13:37:55: Send Sensor Fails

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri May 26 13:37:56 PDT 2006


Wafer sensor at SEND end fails on every wafer.  Must manually remove wafer from cassette and load onto track.




More information about the svgdev2-pcs mailing list