From sjo at snf.stanford.edu  Sun Nov  5 15:46:53 2006
From: sjo at snf.stanford.edu (sjo at snf.stanford.edu)
Date: Sun, 5 Nov 2006 15:46:53 -0800
Subject: Problem svgdev2 SNF 2006-11-05 15:46:52: Send Indexer not Lowering
Message-ID: <mailman.453.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

The send indexer on the front track wouldn't lower at the start of the program, and I could only run a wafer in manual mode.



From vilanova at snf.stanford.edu  Mon Nov  6 08:05:25 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 6 Nov 2006 08:05:25 -0800
Subject: Problem svgdev2 SNF 2006-11-05 15:46:52: Send Indexer not Lowering
Message-ID: <mailman.454.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

refilled canister , good to use. 



From kuanlinc at snf.stanford.edu  Tue Nov 14 15:57:47 2006
From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu)
Date: Tue, 14 Nov 2006 15:57:47 -0800
Subject: Problem svgdev2 SNF 2006-11-14 15:57:47: center problem
Message-ID: <mailman.455.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

wafer is not centered in the developer. Caution.



From vilanova at snf.stanford.edu  Wed Nov 15 08:21:31 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 15 Nov 2006 08:21:31 -0800
Subject: Problem svgdev2 SNF 2006-11-14 15:57:47: center problem
Message-ID: <mailman.456.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

I checked wafer centering  I placed my centering wafer tools  and everything looks Aligned ,Ran Wafers  everything Looks fine
ok to use. 



From kattsai at snf.stanford.edu  Fri Nov 17 23:16:24 2006
From: kattsai at snf.stanford.edu (kattsai at snf.stanford.edu)
Date: Fri, 17 Nov 2006 23:16:24 -0800
Subject: Problem svgdev2 SNF 2006-11-17 23:16:23: low developer fluid
Message-ID: <mailman.457.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

low developer fluid alarm



From filip at snf.stanford.edu  Sat Nov 18 00:18:36 2006
From: filip at snf.stanford.edu (filip at snf.stanford.edu)
Date: Sat, 18 Nov 2006 00:18:36 -0800
Subject: Problem svgdev2 SNF 2006-11-18 00:18:35: refilled
Message-ID: <mailman.458.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

refilled developer



From vilanova at snf.stanford.edu  Mon Nov 20 07:51:51 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 20 Nov 2006 07:51:51 -0800
Subject: Problem svgdev2 SNF 2006-11-17 23:16:23: low developer fluid
Message-ID: <mailman.459.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

refilled canister, ok to use. 



From vilanova at snf.stanford.edu  Mon Nov 20 07:52:03 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 20 Nov 2006 07:52:03 -0800
Subject: Problem svgdev2 SNF 2006-11-18 00:18:35: refilled
Message-ID: <mailman.460.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

refilled canister, ok to use. 



From jimkruger at snf.stanford.edu  Wed Nov 22 15:21:19 2006
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Wed, 22 Nov 2006 15:21:19 -0800
Subject: Problem svgdev2 SNF 2006-11-22 15:21:18: leaving developer stains on backs of wafers
Message-ID: <mailman.461.1357938780.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Nov 27 07:54:51 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 27 Nov 2006 07:54:51 -0800
Subject: Problem svgdev2 SNF 2006-11-22 15:21:18: leaving developer stains on backs of wafers
Message-ID: <mailman.462.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

Cycled many wafers , I could not repeat the problem , Wafers
come out clean on the bottom , ok to use.