From jimkruger at snf.stanford.edu  Wed Apr  4 14:51:08 2007
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Wed, 4 Apr 2007 14:51:08 -0700
Subject: Comment svgdev2 SNF 2007-04-04 14:51:07: Backside scum Track2 (front)
Message-ID: <mailman.488.1357938780.25913.svgdev2-pcs@snf.stanford.edu>

The backside scum was much better, but still some visible on most wafers. (after maintenance had worked on it , about 12:30 pm 4/4/07).  SRD removes it.



From vilanova at snf.stanford.edu  Thu Apr  5 07:50:48 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 5 Apr 2007 07:50:48 -0700
Subject: Comment svgdev2 SNF 2007-04-04 14:51:07: Backside scum Track2 (front)
Message-ID: <mailman.489.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

adjusted bottom nozzle cycled wafers , no more spots
on the back of the wafers , ok to use. 



From vilanova at snf.stanford.edu  Thu Apr  5 07:51:28 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 5 Apr 2007 07:51:28 -0700
Subject: Comment svgdev2 SNF 2007-03-07 02:47:46: Developer rings on backside of wafer
Message-ID: <mailman.490.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

please read previous message concerning  the same Issue. 



From gsosa at snf.stanford.edu  Thu Apr 12 15:32:21 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 12 Apr 2007 15:32:21 -0700
Subject: Comment svgdev2 SNF 2007-04-12 15:32:20: Weekly PM Completed
Message-ID: <mailman.491.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

Weekly PM Completed.
1. Adjusted air ring gap(decreased gap to < 1/16")
2. Adjusted angular position of backside nozzle
3.Increased spindle delay time to .2 seconds for repeatable      wafer loading.



From huangzb at snf.stanford.edu  Fri Apr 27 22:52:57 2007
From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu)
Date: Fri, 27 Apr 2007 22:52:57 -0700
Subject: Problem svgdev2 SNF 2007-04-27 22:52:57: button 5 is not working
Message-ID: <mailman.492.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

Program 4 is wrong and cannot correct it because button 5 is not working



From gsosa at snf.stanford.edu  Mon Apr 30 06:57:50 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 30 Apr 2007 06:57:50 -0700
Subject: Comment svgdev2 SNF 2007-04-12 15:32:20: Weekly PM Completed
Message-ID: <mailman.493.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

Weekly PM Completed