Comment svgdev2 SNF 2007-04-12 15:32:20: Weekly PM Completed

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Apr 12 15:32:21 PDT 2007


Weekly PM Completed.
1. Adjusted air ring gap(decreased gap to < 1/16")
2. Adjusted angular position of backside nozzle
3.Increased spindle delay time to .2 seconds for repeatable      wafer loading.




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