From mahnaz at snf.stanford.edu Wed Aug 1 10:37:32 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:37:32 -0700 Subject: Problem svgdev2 SNF 2007-08-01 10:37:31: hot plate is contaminted Message-ID: needs cleanning From vilanova at snf.stanford.edu Wed Aug 1 10:52:51 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:52:51 -0700 Subject: Problem svgdev2 SNF 2007-08-01 10:37:31: hot plate is contaminted Message-ID: cleaned hotplate cycled wafers, ok to use. From yspark at snf.stanford.edu Wed Aug 1 12:12:39 2007 From: yspark at snf.stanford.edu (yspark at snf.stanford.edu) Date: Wed, 1 Aug 2007 12:12:39 -0700 Subject: Problem svgdev2 SNF 2007-08-01 12:12:39: Wafer transfer Message-ID: Ocasionally wafer does not brought out from loading cassette. Had to pull out manually with twizer. From yspark at snf.stanford.edu Wed Aug 1 12:15:12 2007 From: yspark at snf.stanford.edu (yspark at snf.stanford.edu) Date: Wed, 1 Aug 2007 12:15:12 -0700 Subject: Comment svgdev2 SNF 2007-08-01 12:15:12: Wafer transfer Message-ID: Put report in a wrong place. It was about svgdev2. Sorry. From king at snf.stanford.edu Wed Aug 1 16:28:52 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 1 Aug 2007 16:28:52 -0700 Subject: Problem svgdev2 SNF 2007-08-01 16:28:51: Slow to move wf from develop to bake Message-ID: After developing, the wafer sits on the chuck a long time before continuing to the bake. From vilanova at snf.stanford.edu Thu Aug 2 10:39:12 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Aug 2007 10:39:12 -0700 Subject: Problem svgdev2 SNF 2007-08-01 16:28:51: Slow to move wf from develop to bake Message-ID: Adjusted up cilynder air flow cycled wafers, ok to use. From vilanova at snf.stanford.edu Thu Aug 2 14:49:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Aug 2007 14:49:07 -0700 Subject: Problem svgdev2 SNF 2007-08-01 12:12:39: Wafer transfer Message-ID: adjusted air sensor flow, cycled wafers , ok to use From vilanova at snf.stanford.edu Thu Aug 2 14:49:18 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Aug 2007 14:49:18 -0700 Subject: Comment svgdev2 SNF 2007-08-01 12:15:12: Wafer transfer Message-ID: adjusted air sensor flow, cycled wafers , ok to use From mahnaz at snf.stanford.edu Mon Aug 6 16:02:20 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 6 Aug 2007 16:02:20 -0700 Subject: Problem svgdev2 SNF 2007-08-06 16:02:19: it makes a funny/loud noise Message-ID: From vilanova at snf.stanford.edu Tue Aug 7 07:06:42 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 7 Aug 2007 07:06:42 -0700 Subject: Problem svgdev2 SNF 2007-08-06 16:02:19: it makes a funny/loud noise Message-ID: Lubricated Receive Indexer, no more noise, ok to use. From fahad88 at snf.stanford.edu Thu Aug 9 04:43:41 2007 From: fahad88 at snf.stanford.edu (fahad88 at snf.stanford.edu) Date: Thu, 9 Aug 2007 04:43:41 -0700 Subject: Problem svgdev2 SNF 2007-08-09 04:43:41: problem with loading Message-ID: cassette lowers, but belts do not turn, wafer stays in the cassette. From vilanova at snf.stanford.edu Thu Aug 9 07:12:17 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Aug 2007 07:12:17 -0700 Subject: Problem svgdev2 SNF 2007-08-09 04:43:41: problem with loading Message-ID: the loading system wasnt working because someone ran a wafer upside down and there was a lot of resist on the post bake hotplate, cleaned hotplate cycled wafers, ok to use. please !! do not run wafers upside down!!! From uli at snf.stanford.edu Fri Aug 10 10:59:21 2007 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 10 Aug 2007 10:59:21 -0700 Subject: Comment svgdev2 SNF 2007-08-10 10:59:20: updated program sheet Message-ID: From ecocker at snf.stanford.edu Fri Aug 10 11:23:08 2007 From: ecocker at snf.stanford.edu (ecocker at snf.stanford.edu) Date: Fri, 10 Aug 2007 11:23:08 -0700 Subject: Problem svgdev2 SNF 2007-08-10 11:23:07: trouble with receiving cassette Message-ID: It seems like track#2 is having a problem sensing whether or not the receiving cassette is in place. I had to manually press the bar on the cassette holder in order for it to pull the cassette down. From vilanova at snf.stanford.edu Fri Aug 10 14:44:49 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Aug 2007 14:44:49 -0700 Subject: Problem svgdev2 SNF 2007-08-10 11:23:07: trouble with receiving cassette Message-ID: I could not repeat the problem , I cycled many wafers and the receving indexer is working fine, ok to use. From mahnaz at snf.stanford.edu Fri Aug 17 14:00:26 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 17 Aug 2007 14:00:26 -0700 Subject: Comment svgdev2 SNF 2007-08-17 14:00:26: painfully slow Message-ID: From mtang at snf.stanford.edu Mon Aug 20 09:46:10 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 20 Aug 2007 09:46:10 -0700 Subject: Problem svgdev2 SNF 2007-08-20 09:46:09: Chuck air cylinder is slow Message-ID: Mario & Gary will look at this, but it is OK to use -- just slow. From vilanova at snf.stanford.edu Mon Aug 20 11:15:45 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 11:15:45 -0700 Subject: Shutdown svgdev2 SNF 2007-08-20 11:15:45: maintenance in progress..... Message-ID: From vilanova at snf.stanford.edu Mon Aug 20 14:33:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 14:33:47 -0700 Subject: Shutdown svgdev2 SNF 2007-08-20 11:15:45: maintenance in progress..... Message-ID: Maintenance completed, adjusted air cylinder pressure, cleaned catch cup, cycled wafers , ok to use. From vilanova at snf.stanford.edu Mon Aug 20 14:33:58 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 14:33:58 -0700 Subject: Comment svgdev2 SNF 2007-08-17 14:00:26: painfully slow Message-ID: Adjusted Dispense Flow, Cleaned Catch cup, Adjusted exhaust , Cycled wafers , ok to use. From vilanova at snf.stanford.edu Mon Aug 20 14:34:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 14:34:07 -0700 Subject: Problem svgdev2 SNF 2007-08-20 09:46:09: Chuck air cylinder is slow Message-ID: Adjusted Dispense Flow, Cleaned Catch cup, Adjusted exhaust , Cycled wafers , ok to use. From fmadriz at snf.stanford.edu Tue Aug 21 19:36:34 2007 From: fmadriz at snf.stanford.edu (fmadriz at snf.stanford.edu) Date: Tue, 21 Aug 2007 19:36:34 -0700 Subject: Problem svgdev2 SNF 2007-08-21 19:36:34: dummy wafer broke inside the chamber. Message-ID: Needs to be cleaned. From vilanova at snf.stanford.edu Wed Aug 22 07:31:33 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Aug 2007 07:31:33 -0700 Subject: Problem svgdev2 SNF 2007-08-21 19:36:34: dummy wafer broke inside the chamber. Message-ID: removed broken pieces, cleaned catch cup, cycled wafers, ready to use. From gibby at snf.stanford.edu Wed Aug 22 20:36:36 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Wed, 22 Aug 2007 20:36:36 -0700 Subject: Problem svgdev2 SNF 2007-08-22 20:36:35: Send indexer is sticking... Message-ID: From gsosa at snf.stanford.edu Thu Aug 23 09:54:31 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Aug 2007 09:54:31 -0700 Subject: Shutdown svgdev2 SNF 2007-08-23 09:54:30: Send indexer not working Message-ID: Send indexer not working From gsosa at snf.stanford.edu Thu Aug 23 16:52:41 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 23 Aug 2007 16:52:41 -0700 Subject: Comment svgdev2 SNF 2007-08-23 16:52:41: Developer Status Message-ID: Track is still shut down. The carriage rails on the develop module are not opening. Still troubleshooting. GS/MV From gsosa at snf.stanford.edu Mon Aug 27 09:14:27 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:14:27 -0700 Subject: Shutdown svgdev2 SNF 2007-08-23 09:54:30: Send indexer not working Message-ID: Replaced the indexer belt motor. Tested wafer transfer. All OK.Also had a problem with the carriage rails at develop station. Rails would not open up. Troubleshot and isolated problem to a faulty solinoid. Replaced the solinoid. Adjusted pneumatics. Tested track function. All OK. From gsosa at snf.stanford.edu Mon Aug 27 09:15:23 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:15:23 -0700 Subject: Comment svgdev2 SNF 2007-08-23 16:52:41: Developer Status Message-ID: See prior comments. Track is repaired and ready to use. GS From gsosa at snf.stanford.edu Mon Aug 27 09:16:12 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:16:12 -0700 Subject: Problem svgdev2 SNF 2007-08-22 20:36:35: Send indexer is sticking... Message-ID: Replaced belt motor on send indexer. tested wafer transfer. All OK. From rmelamud at snf.stanford.edu Mon Aug 27 18:20:14 2007 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Mon, 27 Aug 2007 18:20:14 -0700 Subject: Problem svgdev2 SNF 2007-08-27 18:20:13: no transfer? Message-ID: Enabled, Load program to run in auto, placed cassette on track, hit start, nothing happened. From vilanova at snf.stanford.edu Tue Aug 28 07:53:48 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Aug 2007 07:53:48 -0700 Subject: Shutdown svgdev2 SNF 2007-08-28 07:53:47: Wafer Tranfer Motor belt Broken Message-ID: From vilanova at snf.stanford.edu Tue Aug 28 08:52:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Aug 2007 08:52:21 -0700 Subject: Shutdown svgdev2 SNF 2007-08-28 07:53:47: Wafer Tranfer Motor belt Broken Message-ID: MAintenance Completed , ok to use From gyama at snf.stanford.edu Tue Aug 28 09:04:45 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 28 Aug 2007 09:04:45 -0700 Subject: Problem svgdev2 SNF 2007-08-28 09:04:44: will not transfer from load to dev station Message-ID: From vilanova at snf.stanford.edu Tue Aug 28 13:47:38 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Aug 2007 13:47:38 -0700 Subject: Problem svgdev2 SNF 2007-08-27 18:20:13: no transfer? Message-ID: adjusted transfer arm belts air solenoid, cycled wafers, ok to use . From vilanova at snf.stanford.edu Tue Aug 28 13:47:51 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Aug 2007 13:47:51 -0700 Subject: Problem svgdev2 SNF 2007-08-28 09:04:44: will not transfer from load to dev station Message-ID: adjusted transfer arm belts air solenoid, cycled wafers, ok to use .