Shutdown svgdev2 SNF 2007-08-20 11:15:45: maintenance in progress.....

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 20 14:33:47 PDT 2007

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Maintenance completed, adjusted air cylinder pressure,
cleaned catch cup, cycled wafers , ok to use.

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Next message: Problem svgdev2 SNF 2007-08-21 19:36:34: dummy wafer broke inside the chamber.
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