Shutdown svgdev2 SNF 2007-08-23 09:54:30: Send indexer not working

gsosa at gsosa at
Mon Aug 27 09:14:27 PDT 2007

Replaced the indexer belt motor. Tested wafer transfer. All OK.Also had a problem with the carriage rails at develop station. Rails would not open up. Troubleshot and isolated problem to a faulty solinoid. Replaced the solinoid. Adjusted pneumatics. Tested track function. All OK. 

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