Problem svgdev2 SNF 2007-07-12 00:39:02: Wafers not getting transferred

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jul 12 07:02:53 PDT 2007


It looks like someone removed the wafer from the chuck 
before the spin cycle the chuck was in the up position
waiting for a wafer that's why the system wasnt working,
I Initialized system , cycled a few wafers , system back to 
normal , ready to process wafers. 




More information about the svgdev2-pcs mailing list