From mahnaz at snf.stanford.edu  Thu Jun 14 09:04:17 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 14 Jun 2007 09:04:17 -0700
Subject: Problem svgdev2 SNF 2007-06-14 09:04:17: broken wafer in catch cup
Message-ID: <mailman.509.1357938781.25913.svgdev2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Jun 14 10:40:38 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 14 Jun 2007 10:40:38 -0700
Subject: Problem svgdev2 SNF 2007-06-14 09:04:17: broken wafer in catch cup
Message-ID: <mailman.510.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

preventive MOnthly Pm Completed.
Removed Broken wafer pieces, Cleaned catch cupcleaned 
and lubricated Indexer, cleaned hotplate, cleaned dummy
wafers, cycled wafers, Good to use. 



From msuggs at snf.stanford.edu  Thu Jun 21 18:44:28 2007
From: msuggs at snf.stanford.edu (msuggs at snf.stanford.edu)
Date: Thu, 21 Jun 2007 18:44:28 -0700
Subject: Problem svgdev2 SNF 2007-06-21 18:44:28: 
Message-ID: <mailman.511.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

do not run wafer



From vilanova at snf.stanford.edu  Fri Jun 22 07:03:50 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 22 Jun 2007 07:03:50 -0700
Subject: Problem svgdev2 SNF 2007-06-21 18:44:28: 
Message-ID: <mailman.512.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

due to a chill water problem system was not Working properly,
System back to normal now, cycled wafers , ok to use.