Problem svgdev2 SNF 2007-06-14 09:04:17: broken wafer in catch cup

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jun 14 10:40:38 PDT 2007


preventive MOnthly Pm Completed.
Removed Broken wafer pieces, Cleaned catch cupcleaned 
and lubricated Indexer, cleaned hotplate, cleaned dummy
wafers, cycled wafers, Good to use. 




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