Comment svgdev2 SNF 2007-03-07 02:47:46: Developer rings on backside of wafer

rik at snf.stanford.edu rik at snf.stanford.edu
Wed Mar 7 02:47:46 PST 2007


I am getting rings matching the chuck on the backside of my wafer after running it through the developer track. I tried wiping the chuck, which helped but it did not get rid of all the rings.




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