Problem svgdev2 SNF 2007-03-13 21:16:44: Damages wafer

sjo at snf.stanford.edu sjo at snf.stanford.edu
Tue Mar 13 21:16:44 PDT 2007


When running developer program 9 (no develop, bake only), the arm snaps back very fast and makes the wafer bounce up against nozzles, leaving clear indentation mark & scratch on the wafer surface.




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