Shutdown svgdev2 SNF 2007-03-21 20:41:49: Wafer got broken in the spinner.

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Mar 22 08:38:19 PDT 2007


Removed shrouds and cleaned out broken wafer. Tested with dummy wafers. Chuck vacuum OK. Wafer transfer OK. System ready to use.




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