From nharjee at snf.stanford.edu Tue May 1 02:00:27 2007 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Tue, 1 May 2007 02:00:27 -0700 Subject: Problem svgdev2 SNF 2007-05-01 02:00:26: Wafer stuck Message-ID: My wafer is being held in vacuum on the spinner chuck. The machine got stuck in this state prior to dispensing developer. If you can remove my wafer, please put it in my box on the machine. Thanks in advance. From vilanova at snf.stanford.edu Tue May 1 07:50:18 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 May 2007 07:50:18 -0700 Subject: Problem svgdev2 SNF 2007-05-01 02:00:26: Wafer stuck Message-ID: User didnt lower the cassette at the receiving end the hotplate was waiting for a wafer and the wafer from the chuck couldnt move to the next step because of the cassette not been to the bottom position. Lowe cassette removed wafer , cycled wafers,system working fine , ok to use. From vilanova at snf.stanford.edu Tue May 1 07:52:14 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 May 2007 07:52:14 -0700 Subject: Problem svgdev2 SNF 2007-04-27 22:52:57: button 5 is not working Message-ID: I checked All the buttons and button 5 is working , sometimes button might get stuck because people use their tweezers to pressed them down PLEASE DO NOT USE TWEEZERS !!!!USE YOUR FINGERS! , system ok to use. From kimsangb at snf.stanford.edu Fri May 11 02:13:30 2007 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 11 May 2007 02:13:30 -0700 Subject: Problem svgdev2 SNF 2007-05-11 02:13:30: sender does not work Message-ID: the belt is not moving From vipin at snf.stanford.edu Fri May 11 03:56:30 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Fri, 11 May 2007 03:56:30 -0700 Subject: Comment svgdev2 SNF 2007-05-11 03:56:30: Auto mode not working Message-ID: The machine works in manual mode only From vilanova at snf.stanford.edu Fri May 11 07:16:56 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 May 2007 07:16:56 -0700 Subject: Problem svgdev2 SNF 2007-05-11 02:13:30: sender does not work Message-ID: Caqnister was Empty , refilled canister , ok to use. From vilanova at snf.stanford.edu Fri May 11 07:17:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 May 2007 07:17:21 -0700 Subject: Comment svgdev2 SNF 2007-05-11 03:56:30: Auto mode not working Message-ID: canister was empty , Refilled canister, good to go. ! :-) From ccwan at snf.stanford.edu Fri May 11 13:50:22 2007 From: ccwan at snf.stanford.edu (ccwan at snf.stanford.edu) Date: Fri, 11 May 2007 13:50:22 -0700 Subject: Problem svgdev2 SNF 2007-05-11 13:50:21: Develop Program #4 Message-ID: Event 1 and 9's speed have been changed by some people. Button 5 was down so speed cannot be changed back to their original values. From vilanova at snf.stanford.edu Fri May 11 14:24:05 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 May 2007 14:24:05 -0700 Subject: Problem svgdev2 SNF 2007-05-11 13:50:21: Develop Program #4 Message-ID: replaced broken keyboard, cycled wafers, Ok to use. From sinwood at snf.stanford.edu Sun May 13 12:37:40 2007 From: sinwood at snf.stanford.edu (sinwood at snf.stanford.edu) Date: Sun, 13 May 2007 12:37:40 -0700 Subject: Problem svgdev2 SNF 2007-05-13 12:37:40: no spin Message-ID: spinner is not working From jcdoll at snf.stanford.edu Sun May 13 16:52:24 2007 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Sun, 13 May 2007 16:52:24 -0700 Subject: Problem svgdev2 SNF 2007-05-13 16:52:23: send conveyor belt doesn't run Message-ID: the conveyor belt under the send indexer does not run. same problem as seem with track 1 today. From gsosa at snf.stanford.edu Mon May 14 07:45:00 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 07:45:00 -0700 Subject: Problem svgdev2 SNF 2007-05-13 16:52:23: send conveyor belt doesn't run Message-ID: Refilled the developer canister. Tested operation. All OK. From gsosa at snf.stanford.edu Mon May 14 07:46:17 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 07:46:17 -0700 Subject: Problem svgdev2 SNF 2007-05-13 12:37:40: no spin Message-ID: Refilled developer canister. System tested OK> From mahnaz at snf.stanford.edu Mon May 14 11:02:17 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 14 May 2007 11:02:17 -0700 Subject: Problem svgdev2 SNF 2007-05-14 11:02:16: developer residue on the back of wafers Message-ID: From gsosa at snf.stanford.edu Mon May 14 15:45:58 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 14 May 2007 15:45:58 -0700 Subject: Problem svgdev2 SNF 2007-05-14 11:02:16: developer residue on the back of wafers Message-ID: Checked B/S rinse with glass wafer- OK. Adjusted angle of B/S nozzle. Cleaned chuck. All looks OK.