Problem svgdev2 SNF 2007-05-01 02:00:26: Wafer stuck

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Tue May 1 02:00:27 PDT 2007


My wafer is being held in vacuum on the spinner chuck. The machine got stuck in this state prior to dispensing developer. If you can remove my wafer, please put it in my box on the machine. Thanks in advance.




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