Problem svgdev2 SNF 2007-05-01 02:00:26: Wafer stuck

nharjee at nharjee at
Tue May 1 02:00:27 PDT 2007

My wafer is being held in vacuum on the spinner chuck. The machine got stuck in this state prior to dispensing developer. If you can remove my wafer, please put it in my box on the machine. Thanks in advance.

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