Problem svgdev2 SNF 2007-05-01 02:00:26: Wafer stuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue May 1 07:50:18 PDT 2007


User didnt lower the cassette at the receiving end the hotplate
was waiting for a wafer and the wafer from the chuck couldnt move to the next step because of the cassette not been to the bottom position.  Lowe cassette removed wafer , cycled wafers,system working fine , ok to use. 




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