Problem svgdev2 SNF 2007-05-14 11:02:16: developer residue on the back of wafers

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon May 14 15:45:58 PDT 2007


Checked B/S rinse with glass wafer- OK. Adjusted angle of       B/S nozzle. Cleaned chuck. All looks OK.




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