Comment svgdev2 SNF 2007-11-07 16:45:08:

[mahnaz at snf.stanford.edu]

I am  sending this email out with regards to developing asml  wafers with 955-.7 I line resist. If you see the circular ring on your wafers you may choose to develop with program 5 on the SVGdev2  which Is exact copy of program 2 without the rinse.
I have ran some wafers and still waiting for SEM result,  till  I get the result and be able to run more tests might be a while so I thought to share the information with you all.