Problem svgdev2 SNF 2007-11-08 06:14:40: Resist under developed around edge of wafer

gibby at snf.stanford.edu gibby at snf.stanford.edu
Thu Nov 8 06:14:40 PST 2007


This is the same problem that we have seen before.  ~1cm ring of under developed resist around the edge of the wafer.  I've run wafers identically without seeing this problem for the past few weeks.




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