From nppatil at snf.stanford.edu  Thu Oct  4 11:28:16 2007
From: nppatil at snf.stanford.edu (nppatil at snf.stanford.edu)
Date: Thu, 4 Oct 2007 11:28:16 -0700
Subject: Problem svgdev2 SNF 2007-10-04 11:28:15: 3612 non-uniformity
Message-ID: <mailman.577.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

Non-uniform develop for 3612 1um. Features > 10um.
Exposed on ASML. 60s dev on track.



From xzhuan1 at snf.stanford.edu  Sun Oct  7 15:42:41 2007
From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu)
Date: Sun, 7 Oct 2007 15:42:41 -0700
Subject: Problem svgdev2 SNF 2007-10-07 15:42:40: wafer missed the developer stopper.
Message-ID: <mailman.578.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

In two instances, the wafer went directly to baking plate without stopping at the developer.  Please look into this.



From vilanova at snf.stanford.edu  Mon Oct  8 07:57:59 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 8 Oct 2007 07:57:59 -0700
Subject: Problem svgdev2 SNF 2007-10-04 11:28:15: 3612 non-uniformity
Message-ID: <mailman.579.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

I think this was meant for the Coater and not the developer
 track. 



From vilanova at snf.stanford.edu  Mon Oct  8 08:00:11 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 8 Oct 2007 08:00:11 -0700
Subject: Problem svgdev2 SNF 2007-10-07 15:42:40: wafer missed the developer stopper.
Message-ID: <mailman.580.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

the track is running Fine, the problem was that the user had it
at Bypass ( program # 9) thats why the wafer went to the 
straight to the hotplate, Also the user POWER DOWN! the 
track for no reason!!! turned power back on, cycled wafers
, ok to use. 



From vilanova at snf.stanford.edu  Mon Oct  8 08:01:33 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 8 Oct 2007 08:01:33 -0700
Subject: Comment svgdev2 SNF 2007-09-01 15:22:25: Developer track arms slamming hard together
Message-ID: <mailman.581.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

Air adjusted , now the arms are wqorking nice and smooth.



From rostam at snf.stanford.edu  Wed Oct 10 16:24:46 2007
From: rostam at snf.stanford.edu (rostam at snf.stanford.edu)
Date: Wed, 10 Oct 2007 16:24:46 -0700
Subject: Problem svgdev2 SNF 2007-10-10 16:24:45: 
Message-ID: <mailman.582.1357938781.25913.svgdev2-pcs@snf.stanford.edu>

I developed 1.6um resist with program 4-2. there are some junk left all over the wafers.