Problem svgdev2 SNF 2007-10-04 11:28:15: 3612 non-uniformity

nppatil at snf.stanford.edu nppatil at snf.stanford.edu
Thu Oct 4 11:28:16 PDT 2007

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Non-uniform develop for 3612 1um. Features > 10um.
Exposed on ASML. 60s dev on track.

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