From king at snf.stanford.edu Sat Sep 1 15:22:25 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 1 Sep 2007 15:22:25 -0700 Subject: Comment svgdev2 SNF 2007-09-01 15:22:25: Developer track arms slamming hard together Message-ID: after the develop cycle is done. Watch out. From gsosa at snf.stanford.edu Wed Sep 5 07:58:28 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Sep 2007 07:58:28 -0700 Subject: Shutdown svgdev2 SNF 2007-09-05 07:58:26: Replacing rail air cylinder Message-ID: Replacing carriage air cylinder on developer module. From gsosa at snf.stanford.edu Wed Sep 5 09:05:36 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 5 Sep 2007 09:05:36 -0700 Subject: Shutdown svgdev2 SNF 2007-09-05 07:58:26: Replacing rail air cylinder Message-ID: Replaced the carriage air cylinder. From mrobles at snf.stanford.edu Fri Sep 21 09:43:08 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 21 Sep 2007 09:43:08 -0700 Subject: Problem svgdev2 SNF 2007-09-21 09:43:06: Enabled SVG2 and CORAL indicator light did not come on. Message-ID: The light did not come on, but I was able to use the developer. From gibby at snf.stanford.edu Fri Sep 21 12:17:12 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Fri, 21 Sep 2007 12:17:12 -0700 Subject: Problem svgdev2 SNF 2007-09-21 12:17:11: Enabled "on" light will not turn on Message-ID: From mahnaz at snf.stanford.edu Fri Sep 21 17:07:27 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 21 Sep 2007 17:07:27 -0700 Subject: Shutdown svgdev2 SNF 2007-09-21 17:07:26: Bad result with LDD26W and MF26A Message-ID: Something major is wrong with track. Both developers LDD26w and MF26A gave bad result. I have confirmed that the chemicals are not the culprit because the back track gave good result on both recipes with both different developers. I even hand developed some wafers in the state of panic to confirm that our chemicals are good. I think that the problem is mechanical. From vilanova at snf.stanford.edu Mon Sep 24 07:21:52 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Sep 2007 07:21:52 -0700 Subject: Problem svgdev2 SNF 2007-09-21 09:43:06: Enabled SVG2 and CORAL indicator light did not come on. Message-ID: I FOund the power supply disconnected, Pluged it back in LED "ON" Light working now. From vilanova at snf.stanford.edu Mon Sep 24 07:22:05 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Sep 2007 07:22:05 -0700 Subject: Problem svgdev2 SNF 2007-09-21 12:17:11: Enabled "on" light will not turn on Message-ID: I Found the power supply disconnected, Pluged it back in LED "ON" Light working now. From gsosa at snf.stanford.edu Mon Sep 24 16:20:03 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 24 Sep 2007 16:20:03 -0700 Subject: Comment svgdev2 SNF 2007-09-24 16:20:02: Carriage rails slamming too hard Message-ID: Reduced sytem air pressure from 50 to 35 PSI. Re-tuned pneumatics on developer module. Carriage rails stopped working on the bake module. Had to clean and lube the air cylinder and guide shafts. After cleaning, re-tumed pneumatics on bake rails for smooth motion. GS From mahnaz at snf.stanford.edu Mon Sep 24 16:24:48 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 24 Sep 2007 16:24:48 -0700 Subject: Shutdown svgdev2 SNF 2007-09-21 17:07:26: Bad result with LDD26W and MF26A Message-ID: I ran two sets of two wafers on ASML with two different masks and ran them on svgdev and svgdev2 and did not notice any difference. Mario ran two wafers with 3612 on KS and ran the wafers on both developer track ad we did not notice the problem the track went down for. I am not sure how to explain this, the system still down because the rails are opening and closing very hard and Gary is working on it. From gsosa at snf.stanford.edu Wed Sep 26 11:46:45 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 Sep 2007 11:46:45 -0700 Subject: Shutdown svgdev2 SNF 2007-09-26 11:46:44: I-line resist develop non-uniformity Message-ID: Investigating i-line developer non-uniformity problem. From gsosa at snf.stanford.edu Wed Sep 26 16:58:49 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 Sep 2007 16:58:49 -0700 Subject: Shutdown svgdev2 SNF 2007-09-26 11:46:44: I-line resist develop non-uniformity Message-ID: Still working on Deveoper non uniformity issues with wafers exposed at ASM-L stepper. From gsosa at snf.stanford.edu Wed Sep 26 17:08:30 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 26 Sep 2007 17:08:30 -0700 Subject: Problem svgdev2 SNF 2007-09-26 17:08:29: I-line Develop W/ ASM-L Stepper Message-ID: Still working on developer non-uniformity issues with I-line ASM-L Process.Further investigation to be done. Track OK to use with caution. Please make note of any unusual developer issues. GS From calarrudo at snf.stanford.edu Thu Sep 27 10:30:18 2007 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 27 Sep 2007 10:30:18 -0700 Subject: Problem svgdev2 SNF 2007-09-27 10:30:16: Develop track 2 Message-ID: Develop track 2 leaving residue on wafer backs. From vilanova at snf.stanford.edu Thu Sep 27 10:40:37 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Sep 2007 10:40:37 -0700 Subject: Problem svgdev2 SNF 2007-09-27 10:30:16: Develop track 2 Message-ID: Adjusted Wafer Bottom Nozzle, cycled a few wafers , no residues or marks left on the bottom of wafer, ok to use.