Shutdown svgdev2 SNF 2007-09-21 17:07:26: Bad result with LDD26W and MF26A

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Sep 21 17:07:27 PDT 2007


Something major is wrong with track.
Both developers  LDD26w and MF26A gave bad result.
I have confirmed that the chemicals are not the culprit because the back track
gave good result on both recipes with both  different developers. I even  hand
developed some wafers in the state of panic to confirm that our chemicals are good.
 I think that the problem is mechanical.




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