Problem svgdev2 SNF 2008-08-08 19:12:53: Wafers do not process to reciever
ahazeghi at snf.stanford.edu
ahazeghi at snf.stanford.edu
Fri Aug 8 19:12:54 PDT 2008
wafer stays on top of hot plate and does not proceed to reciever. program and times are OK, please check.
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