Problem svgdev2 SNF 2008-08-08 19:12:53: Wafers do not process to reciever

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Aug 11 07:36:39 PDT 2008


Cycled wafers I could not repeat the problem, Someone 
picked up the wafer before it went into the receiving
cassette therefore when someone else Use it the 
receiver cassette sensor was waiting for a wafers. 
ok to use.-




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