From emyers at snf.stanford.edu Sat Dec 6 13:28:46 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 6 Dec 2008 13:28:46 -0800 Subject: Problem svgdev2 SNF 2008-12-06 13:28:45: Send Indexer Message-ID: The send indexer stops when it reaches the top slot. It stays down and the only way to recover is to power cycle. From vilanova at snf.stanford.edu Mon Dec 8 07:55:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Dec 2008 07:55:14 -0800 Subject: Problem svgdev2 SNF 2008-12-06 13:28:45: Send Indexer Message-ID: Adjusted air to Send Indexer cycled 14 wafers ( twice ) Indexer working fine, refilled canister and replaced broken belt On Dev # 1, ok to use. From mahnaz at snf.stanford.edu Tue Dec 9 13:12:59 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 9 Dec 2008 13:12:59 -0800 Subject: Shutdown svgdev2 SNF 2008-12-09 13:12:58: low dev, LDD26W Message-ID: From gsosa at snf.stanford.edu Tue Dec 9 13:31:20 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 9 Dec 2008 13:31:20 -0800 Subject: Shutdown svgdev2 SNF 2008-12-09 13:12:58: low dev, LDD26W Message-ID: Refilled the developer canister From sbasumal at snf.stanford.edu Thu Dec 11 01:35:18 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Thu, 11 Dec 2008 01:35:18 -0800 Subject: Problem svgdev2 SNF 2008-12-11 01:35:17: belt does not seem to be working Message-ID: From vilanova at snf.stanford.edu Thu Dec 11 07:25:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Dec 2008 07:25:53 -0800 Subject: Problem svgdev2 SNF 2008-12-11 01:35:17: belt does not seem to be working Message-ID: Operator error,checked and tested system , cycled 5 wafers and all the belts are working properly,ok to use From mahnaz at snf.stanford.edu Thu Dec 11 12:35:59 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 11 Dec 2008 12:35:59 -0800 Subject: Problem svgdev2 SNF 2008-12-11 12:35:58: transfer stop is on Message-ID: the cassett will not go up and down, needs help. From rshyam at snf.stanford.edu Fri Dec 12 11:17:41 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 12 Dec 2008 11:17:41 -0800 Subject: Problem svgdev2 SNF 2008-12-12 11:17:38: Wafer has problem occasionally getting transferred into output cassette Message-ID: From gsosa at snf.stanford.edu Mon Dec 15 15:28:35 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 15 Dec 2008 15:28:35 -0800 Subject: Problem svgdev2 SNF 2008-12-12 11:17:38: Wafer has problem occasionally getting transferred into output cassette Message-ID: Only 1 air sensor on HPO rails were functional. When wafer flats were orientated so that the good sensor was missed, the wafer would not stop at the HPO to bake. Both sensors functioning properly as indicated by the LED's on the sensor PC board( underneath the carriage. However, 1 sensor signal was not getting from the sensor PC board to the CPU board. Troubleshot and verified that interconnect was good between the sensor PC board and the CPU board. Installed new sensor PC board and tested sensor feedback to CPU board- All OK ( both sensors recognized by CPU board and sensor states change when flagged) Cycled many wafers and adjusted carriage belt speed. All tested OK.