From gsosa at snf.stanford.edu Wed Feb 6 08:21:22 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 6 Feb 2008 08:21:22 -0800 Subject: Shutdown svgdev2 SNF 2008-02-06 08:21:22: Need to flush out developer Message-ID: From gsosa at snf.stanford.edu Wed Feb 6 11:04:18 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 6 Feb 2008 11:04:18 -0800 Subject: Shutdown svgdev2 SNF 2008-02-06 08:21:22: Need to flush out developer Message-ID: Poured 1 gallon of MF-26 developer into the LDD-26 canister during refill process by accident. Drained cannister of contents.Rinsed interior of canister with 1 gallon of LDD-26 developer and flushed. Refilled canister with 5 gallons of fresh LDD-26 developer and ran several dummy wafer. All OK. From chughes at snf.stanford.edu Thu Feb 7 11:30:09 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Thu, 7 Feb 2008 11:30:09 -0800 Subject: Comment svgdev2 SNF 2008-02-07 11:30:08: Develop Program #3 was changed. Message-ID: I ran program #3 today, and when I checked the details, someone had set the rinse to 0.00 seconds. I set it back to 10.0. From chen0622 at snf.stanford.edu Thu Feb 14 10:21:18 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Thu, 14 Feb 2008 10:21:18 -0800 Subject: Problem svgdev2 SNF 2008-02-14 10:21:18: developer residual on back of wafer Message-ID: From vilanova at snf.stanford.edu Thu Feb 14 11:01:56 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Feb 2008 11:01:56 -0800 Subject: Comment svgdev2 SNF 2008-02-07 11:30:08: Develop Program #3 was changed. Message-ID: that's why is good to check your program before you use it. From vilanova at snf.stanford.edu Thu Feb 14 11:02:41 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Feb 2008 11:02:41 -0800 Subject: Problem svgdev2 SNF 2008-02-14 10:21:18: developer residual on back of wafer Message-ID: adjusted backside rinse dispense and dispense nozzle, cycled wafers, ok to use. From bilee at snf.stanford.edu Tue Feb 19 02:26:14 2008 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Tue, 19 Feb 2008 02:26:14 -0800 Subject: Problem svgdev2 SNF 2008-02-19 02:26:14: Broken wafer peices Message-ID: Found broken wafer peices inside the container From vilanova at snf.stanford.edu Tue Feb 19 07:29:21 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 07:29:21 -0800 Subject: Problem svgdev2 SNF 2008-02-19 02:26:14: Broken wafer peices Message-ID: Cleaned catch cup, removed broken wafer, cycled test Good to use. From shwong at snf.stanford.edu Tue Feb 19 10:14:37 2008 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Tue, 19 Feb 2008 10:14:37 -0800 Subject: Problem svgdev2 SNF 2008-02-19 10:14:37: developer doesn't start spinning; vacuum comes on to hold wafer, but program doesn't start Message-ID: From vilanova at snf.stanford.edu Tue Feb 19 14:01:11 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 14:01:11 -0800 Subject: Problem svgdev2 SNF 2008-02-19 10:14:37: developer doesn't start spinning; vacuum comes on to hold wafer, but program doesn't start Message-ID: air hose was blocking the arm to open all the way MOved the Hose to a different location, system working Fine back to normal. From gsosa at snf.stanford.edu Fri Feb 22 09:48:59 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 Feb 2008 09:48:59 -0800 Subject: Shutdown svgdev2 SNF 2008-02-22 09:48:59: DI water problem Message-ID: From gsosa at snf.stanford.edu Fri Feb 22 14:08:50 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 22 Feb 2008 14:08:50 -0800 Subject: Shutdown svgdev2 SNF 2008-02-22 09:48:59: DI water problem Message-ID: DI water system is up and back online From chughes at snf.stanford.edu Sun Feb 24 17:21:04 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Sun, 24 Feb 2008 17:21:04 -0800 Subject: Problem svgdev2 SNF 2008-02-24 17:21:04: Starburst Pattern Message-ID: This Sunday, I used the 955 .7 um photoresist and exposed at 60 mj, and attempted to develop on svgdev2. I tried 3 wafers, and each resulted in a strange "starburst" pattern across the wafer with very roughly resolved features. I processed the rest of my wafer on svgdev, and they showed no problem. From gibby at snf.stanford.edu Sun Feb 24 20:08:10 2008 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sun, 24 Feb 2008 20:08:10 -0800 Subject: Comment svgdev2 SNF 2008-02-24 20:08:09: Re: Starburst Pattern Message-ID: 60 mJ/cm^2 strikes me as a low exposure for 955. Perhaps underexposure is the issue... From chughes at snf.stanford.edu Sun Feb 24 21:02:03 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Sun, 24 Feb 2008 21:02:03 -0800 Subject: Comment svgdev2 SNF 2008-02-24 21:02:02: Starburst Pattern #2 Message-ID: Believe me, it was not the exposure level; all wafers developed on svgdev2 showed the pattern, while the svgdev wafers were all fine. From mtang at snf.stanford.edu Wed Feb 27 09:35:11 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 27 Feb 2008 09:35:11 -0800 Subject: Problem svgdev2 SNF 2008-02-24 17:21:04: Starburst Pattern Message-ID: This appears to have been a processing issue with regard to resist and exposure used and now resolved.