Shutdown svgdev2 SNF 2008-02-06 08:21:22: Need to flush out developer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Feb 6 11:04:18 PST 2008


Poured 1 gallon of MF-26 developer into the LDD-26 canister during refill process by accident. Drained cannister of contents.Rinsed interior of canister with 1 gallon of LDD-26 developer and flushed. Refilled canister with  5 gallons of fresh LDD-26 developer and ran several dummy wafer. All OK.




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