Problem svgdev2 SNF 2008-02-19 10:14:37: developer doesn't start spinning; vacuum comes on to hold wafer, but program doesn't start

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Feb 19 14:01:11 PST 2008


air hose was blocking the arm to open all the way
MOved the Hose to a different location, system working Fine
back to normal.




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