Problem svgdev2 SNF 2008-02-24 17:21:04: Starburst Pattern

chughes at snf.stanford.edu chughes at snf.stanford.edu
Sun Feb 24 17:21:04 PST 2008


This Sunday, I used the 955 .7 um photoresist and exposed at 60 mj, and attempted to develop on svgdev2. I tried 3 wafers, and each resulted in a strange "starburst" pattern across the wafer with very roughly resolved features. I processed the rest of my wafer on svgdev, and they showed no problem.




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