From vilanova at snf.stanford.edu Thu Jan 3 11:20:05 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 11:20:05 -0800 Subject: Shutdown svgdev2 SNF 2007-12-19 07:21:23: holiday maitenance shutdown Message-ID: system tested, back on. From mtang at snf.stanford.edu Wed Jan 9 09:41:48 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 9 Jan 2008 09:41:48 -0800 Subject: Problem svgdev2 SNF 2007-11-08 06:14:40: Resist under developed around edge of wafer Message-ID: See comment 11/14 by gibby. From mtang at snf.stanford.edu Wed Jan 9 09:43:25 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 9 Jan 2008 09:43:25 -0800 Subject: Problem svgdev2 SNF 2007-09-26 17:08:29: I-line Develop W/ ASM-L Stepper Message-ID: Resolved. See Mahnaz notes on 11/7 re recipe #5 From mtang at snf.stanford.edu Wed Jan 9 09:43:55 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 9 Jan 2008 09:43:55 -0800 Subject: Problem svgdev2 SNF 2007-10-10 16:24:45: Message-ID: From jrjain at snf.stanford.edu Sat Jan 12 13:54:14 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sat, 12 Jan 2008 13:54:14 -0800 Subject: Problem svgdev2 SNF 2008-01-12 13:54:13: Rail problem Message-ID: Rails sometimes don't retract far enough, so aluminum shield hits black wafer stops on rails and can't raise fully prior to develop. From vilanova at snf.stanford.edu Mon Jan 14 08:26:08 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Jan 2008 08:26:08 -0800 Subject: Problem svgdev2 SNF 2008-01-12 13:54:13: Rail problem Message-ID: checked system air pressure , Seems to be working Fine Cycled 3 wafers ( twice ) I could not repeat teh problem, Ok to use. From ywidjaja at snf.stanford.edu Wed Jan 16 06:31:26 2008 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Wed, 16 Jan 2008 06:31:26 -0800 Subject: Problem svgdev2 SNF 2008-01-16 06:31:26: developer solution drops Message-ID: Some developer solution drops onto wafers when wafers are about to be transferred to the hot plate. Was running developer program #5. Ran some dummy wafers but problems still occured. From vilanova at snf.stanford.edu Wed Jan 16 07:41:19 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Jan 2008 07:41:19 -0800 Subject: Problem svgdev2 SNF 2008-01-16 06:31:26: developer solution drops Message-ID: cycled wafers and I could not repeat the problem, ok to use. From mahnaz at snf.stanford.edu Wed Jan 16 10:54:44 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jan 2008 10:54:44 -0800 Subject: Shutdown svgdev2 SNF 2008-01-16 10:54:44: something is wrong Message-ID: On behalf of EE410 , had trouble running it, I ran a wafer and almost broke the wafer. Needs immidate attention. From gsosa at snf.stanford.edu Wed Jan 16 14:20:16 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 16 Jan 2008 14:20:16 -0800 Subject: Shutdown svgdev2 SNF 2008-01-16 10:54:44: something is wrong Message-ID: Checked and adjusted air pressure for the transfer rails. Tested with dummy wafers. OK. From vilanova at snf.stanford.edu Wed Jan 23 09:14:05 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Jan 2008 09:14:05 -0800 Subject: Comment svgdev2 SNF 2008-01-23 09:14:04: hotplate resist residues Message-ID: I cleaned resist from the hotplates , I guess someone ran a wafer upside down accidently.